Addressable microlens array for parallel laser microfabrication.
نویسندگان
چکیده
Parallel processing in femtosecond-laser-based microfabrication is demonstrated using a microlens array in conjunction with a liquid-crystal spatial light modulator (SLM). A portion of the SLM is mapped onto each individual lenslet in the array and can be used to effectively switch foci on and off for fabrication. In addition, the technique allows for homogenizing the intensity of the array of foci and translating spots relative to their natural focus. The technique demonstrates the potential for high efficiency processing of aperiodic structures.
منابع مشابه
A Doublet Microlens Array for Imaging of Biological Micron-size Objects
We propose a novel fluidic assembly-based microfabrication approach for obtaining low-cost, high numerical aperture (NA), doublet microlens arrays. The proposed doublet architecture consists of glass microspheres trapped on a predefined array of silicon microholes and covered with a thin polymer layer. An array of ~56 μm in diameter microlenses with a numerical aperture of ~0.495 were fabricate...
متن کاملPolymer Based Microfabrication and Its Applications in Optical Mems and Biomems
their professional advices and guidance on my research. experience with all kinds of fun. Finally, the author's grateful appreciation goes to his parents whose hardworking spirit and dedication to family have always been a great example for the author. Figure 2-1 Schematic diagram of tilted UV lithography in water medium (left: the experimental setup; right: optical refraction path). Figure 2-5...
متن کاملHigh Throughput Fluorescence Based Flow Cytometer Using 3d Microfluidics for Parallel Sheath Flow Focusing and Embeded High N.a. Microlens
We report a high throughput microfluidic fluorescence based flow cytometer with parallel sheath flow focusing in 32 channels using only 2 inlets. A detection throughput of 7000 beads/sec in each channel and 224,000 beads/sec for 32 channels has been accomplished. This fluorescence flow cytometer is realized by utilizing 3D soft lithography microfabrication technique to achieve multilayer PDMS s...
متن کاملThe Effects of Profile Errors of Microlens Surfaces on Laser Beam Homogenization
Microlens arrays (MLAs) are key optical components in laser beam homogenization. However, due to imperfect surface profiles resulting from microfabrication, the functionalities of MLAs in beam modulation could be compromised to some extent. In order to address this issue, the effects of surface profile mismatches between ideal and fabricated MLAs on beam homogenization were analyzed. Four types...
متن کاملMicrolens Array Light Trapping in Cdte/cds Solar Cells
In light of the continued rise in fossil fuel costs, alternative energy sources, such as solar technology, are increasingly important. Concentrating photovoltaic systems are promising for future efficient and cost effective competition with fossil fuels. We employ a microlens array to a CdTe/CdS semiconducting solar cell to increase efficiency via light trapping. Since the microlens array will ...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید
ثبت ناماگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید
ورودعنوان ژورنال:
- Optics letters
دوره 36 12 شماره
صفحات -
تاریخ انتشار 2011